Ultra-High-Q Surface-Tension-Induced Monolithically Integrated On-Chip Resonator and Associated Devices


  • Optical biosensors, switches, filters and attenuators
  • Chalcogenide Glass Mid-IR Laser

Problem Addressed

Optical resonators enhance light-matter interactions, thereby dramatically improving the performance of optical devices. A leading resonator, the surface-tension-induced microcavity (STIM) resonator, is currently an off-chip application, exhibiting poor optical coupling and incompatibility with requisite fabrication processes. Partially on-chip designs exhibit vulnerability to environmental changes, require very precise alignment, and also lack robust optical coupling. 


The invention proposes a fully on-chip resonator with effective coupling to achieve a robust, highly reproducible design suitable for industrial scale applications.The fully on-chip ultra-high-Q resonator device is fabricated with selected glass and polymer materials such as chalcogenides and methods including the thermal reflow technique to achieve an ultra-high-Q-factor. An optical coupling scheme allows for full control of the coupling regime between the on-chip STIM and the optical resonator, the coupling strength, and the resonator’s quality factor. CMOS-compatibility is maintained and this highly reproducible device is readily integrated into applications such as lasers and biosensors.


  • Fully on-chip design maintains CMOS-compatibility, improving system robustness
  • Optical resonator coupling suitable for industrial scale applications
  • Select materials achieve robust design with ultra-high-Q-factor performance