High Speed and Low Loss Electro-Absorption GeSi/Si Modulator and Method

An optoelectronic device includes an input waveguide structure that receives an input optical signal. A GeSi/Si waveguide structure receives from the input waveguide the input optical signal and performs selective optoelectronic operations on the input optical signal. The GeSi/Si waveguide structure outputs an optical or electrical output signal associated with the selective optoelectronic operations performed on the input optical signal. An output waveguide structure receives the output optical signal from the GeSi/Si waveguide structure and provides the optical output signal for further processing.

Researchers

Dong Pan / Lionel Kimerling / Jurgen Michel / Jifeng Liu

Departments: Department of Materials Science and Engineering, Materials Research Laboratory
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Photonics, Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment

  • high speed and low loss gesi/si electro-absorption light modulator and method of fabrication using selective growth
    United States of America | Granted | 8,160,404

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