Microscale and Nanoscale Structured Electromechanical Transducers Comprising Compliant Dielectric Spacers
This invention is an electromechanical transducer with a mechanically compliant, elastically deformable array of dielectric shells. A first electrically conductive electrode is disposed on a first surface of the array. A second electrically conductive electrode is disposed on a second surface of the array, where the second surface opposes the first surface. The array is configured to be mechanically compliant and elastically deformable in response to one or more incident forces applied to the electromechanical transducer.
Researchers
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microscale and nanoscale structured electromechanical transducers employing compliant dielectric spacers
United States of America | Published application
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