A MEMS Based Encapsulated Hydrophone

Researchers

Daniel Freeman / Robert White / Jonathan Anderson / Georgios Karamanis / James Vlahakis

Departments: Lincoln Laboratory
Technology Areas: Chemicals & Materials: Composites, Nanotechnology & Nanomaterials / Electronics & Photonics: Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment / Sensing & Imaging: Acoustics

  • mems based encapsulated hydrophone
    United States of America | Pending

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