Remote Epitaxy Through Planar Organic Monolayer
Invention type: Technology
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Case number: #19412
A method of manufacturing a semiconductor device includes forming a release layer on a first substrate and the release layer includes a planar organic molecule. The method also includes forming a single-crystalline film on the release layer and transferring the single-crystalline film from the release layer to a second substrate.
Researchers
Jeehwan Kim
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Kyusang Lee
Departments: Department of Mechanical Engineering
Technology Areas: Electronics & Photonics: Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment
Impact Areas: Advanced Materials
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systems and methods for fabricating semiconductor devices via remote epitaxy
United States of America | Published application
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