Cross-Talk Suppression Filters for Geiger-Mode Avalanche Photodiodes
An avalanche photodiode detector is provided with a substrate including an array of avalanche photodiodes. An optical interface surface of the substrate is arranged for accepting external input radiation. There is provided at least one cross-talk blocking layer of material including apertures positioned to allow external input radiation to reach photodiodes and including material regions positioned for attenuating radiation in the substrate that is produced by photodiodes in the array. Alternatively at least one cross-talk blocking layer of material is disposed on the optical interface surface of the substrate to allow external input radiation to reach photodiodes and attenuate radiation in the substrate that is produced by photodiodes in the array. At least one cross-talk filter layer of material can be disposed in the substrate adjacent to the photodiode structures, including a material that absorbs radiation in the substrate that is produced by photodiodes in the array.
Researchers
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cross-talk suppression in geiger-mode avalanche photodiodes
United States of America | Granted | 10,636,929 -
cross-talk suppression filters for geiger-mode avalanche photodiodes
United States of America | Granted | 10,361,334
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