An Ultrasensitive Thermo-Mechanical Bolometer

A thermo-mechanical bolometer includes a substrate and a sensing component mounted on the substrate. The sensing element comprises (a) at least one thermal-actuation component mounted in parallel with the substrate and (b) a strain sensor mounted on the at least one layer of thermal-actuation component. The at least one thermal-actuation component alone or in combination (a) absorbs electromagnetic waves and converts energy from absorbed electromagnetic waves into a change in temperature and (b) converts the change in temperature into a deformation of the at least one layer. The strain sensor comprises a layer of fragments with a gap space between the fragments, wherein the strain sensor senses the deformation or mechanical movement and exhibits a change in electrical resistance in response to the sensed deformation or mechanical movement.

Researchers

Jing Kong / Tomas Palacios / Yuxuan Lin / Xiang Ji

Departments: Dept of Electrical Engineering & Computer Science
Technology Areas: Electronics & Photonics: Photonics / Sensing & Imaging: Chemical & Radiation Sensing
Impact Areas: Advanced Materials

  • ultrasensitive thermo-mechanical bolometer
    United States of America | Granted | 10,914,637

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