Symmetric Thermocentric Flexure with Minimal Yaw Error Motion
Invention type: Technology
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Case number: #13109
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes one or more optical flats. A flexure arrangement includes a plurality of beam flexures arranged in a symmetric configuration around the one or more optical flats so as to minimize the error yaw motion (θz) from thermal fluctuations associated with fixturing the one or more optical flats.
Researchers
Kamal Youcef-Toumi
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Vijay Shilpiekandula
Departments: Department of Mechanical Engineering
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Industrial Engineering & Automation: Manufacturing & Equipment
Impact Areas: Advanced Materials
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symmetric thermocentric flexure with minimal yaw error protection
United States of America | Granted | 8,795,572
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