Singe-Crystalline Film Bulk Acoustic Resonator
Invention type: Technology
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Case number: #22241
Resonators comprising a single-crystalline semiconductor, and related systems and methods, are generally described.
Researchers
Departments: Department of Mechanical Engineering
Technology Areas: Communication Systems: Wireless / Electronics & Photonics: Semiconductors
Impact Areas: Connected World, Advanced Materials
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single crystalline film bulk acoustic resonator and related systems and methods
Patent Cooperation Treaty | Published application -
single crystalline film bulk acoustic resonator and related systems and methods
United States of America | Pending
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