Selective Polycrystalline Silicon Defect-State Detector Formation

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Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

Researchers

Rajeev Ram / Ofer Tehar-Zahav / Efraim Megged / Zvi Sternberg / Roy Meade / Jeffrey Shainline / Karan Mehta / Vladimir Stojanovic / Jason Orcutt / Milos Popovic

Departments: Dept of Electrical Engineering & Computer Science
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Photonics, Semiconductors / Sensing & Imaging: Chemical & Radiation Sensing, Optical Sensing

  • method and optoelectronic structure providing polysilicon photonic devices with different optical properties in different regions
    United States of America | Granted | 9,768,330

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