Reticle Exchange Device
Non-Exclusively Licensed
Invention type: Technology
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Case number: #22740
An electrostatic chuck includes electrodes to clamp a workpiece, electrodes to electrostatically levitate and position the workpiece, and sensors to detect position and orientation of the workpiece. Lateral motion of the workpiece relative to the electrostatic chuck can be damped prior to clamping.
Researchers
David L Trumper
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Mohan Bhushan
Departments: Department of Mechanical Engineering
Technology Areas: Electronics & Photonics: Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment
Impact Areas: Connected World, Advanced Materials
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reticle exchange device with reticle levitation
United States of America | Published application
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