Reticle Exchange Device

Non-Exclusively Licensed

An electrostatic chuck includes electrodes to clamp a workpiece, electrodes to electrostatically levitate and position the workpiece, and sensors to detect position and orientation of the workpiece. Lateral motion of the workpiece relative to the electrostatic chuck can be damped prior to clamping.

Researchers

David L Trumper / Mohan Bhushan

Departments: Department of Mechanical Engineering
Technology Areas: Electronics & Photonics: Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment

  • reticle exchange device with reticle levitation
    United States of America | Published application

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