Programmable Nanolithography Mask
Invention type: Technology
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Case number: #22133
Researchers
Geoffrey Beach
/ Aik Jun Tan
/ Mantao Huang
Departments: Department of Materials Science and Engineering, Department of Nuclear Science and Engineering
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Computer Science: Networking & Signals / Electronics & Photonics: Semiconductors
Impact Areas: Connected World, Advanced Materials
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programmable nanolithography mask
United States of America | Published application
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