Process for Low-Loss Dielectric
Invention type: Technology
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Case number: #23523L
Researchers
William Oliver
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Arjan Sevi
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Bethany Huffman
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Kyle Serniak
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David Kim
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Evan Golden
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Alexander Melville
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Mollie Schwartz
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Wayne Woods
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Sergey Tolpygo
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Jonilyn Yoder
Departments: Dept of Electrical Engineering & Computer Science, Lincoln Laboratory
Technology Areas: Energy & Distribution: Electrochemical Devices
Impact Areas: Sustainable Future
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process for low-loss dielectric and related structures
United States of America | Pending
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