Process for Low-Loss Dielectric

A method to make a shadow-evaporated parallel-plate superconducting capacitor using an aluminum oxide dielectric.

Departments: Dept of Electrical Engineering & Computer Science, Lincoln Laboratory, Electrical Eng & Computer Sci
Technology Areas: Energy & Distribution: Electrochemical Devices
Impact Areas: Sustainable Future

  • process for low-loss dielectric and related structures
    United States of America | Pending

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