Pedestal Microring Resonators for Enhanced Sensing

This innovation finds applications in chemical sensing across industries like automotive, oil and gas, medical diagnostics, the internet of things, homeland security, and the military, among others.

Researchers

Departments: Materials Research Laboratory
Technology Areas: Electronics & Photonics: Photonics / Sensing & Imaging: Chemical & Radiation Sensing

  • methods and apparatus for pedestal ring resonators
    Patent Cooperation Treaty | Published application
  • methods and apparatus for pedestal ring resonators
    United States of America | Granted | 9,915,785

Technology

The invention is a new waveguide geometry that enhances the interaction between the agent and light and increases signal strength for on-chip detection.

Problem Addressed

Current attempts to detect chemical or biological agents on a single chip have difficulty integrating all elements to achieve a sensor with high signal-to-noise and a small footprint: sensors, waveguides, and photodetectors.

Advantages

  • Small footprint and high sensitivity
  • CMOS compatible fabrication

Publications

Singh, Vivek, et al. "Mid-infrared Materials and Devices on a Si Platform for Optical Sensing." Science and Technology of Advanced Materials 15, no. 1 (January 30, 2014): 014603. doi: 10.1088/1468-6996/15/1/014603.

Lin, Pao Tai, et al. "Chip-Scale Mid-Infrared Chemical Sensors Using Air-Clad Pedestal Silicon Waveguides." Lab on a Chip 13 (2013): 2161-2166. doi: 10.1039/C3LC50177A.

Lin, Pao Tai, et al. "Air-Clad Silicon Pedestal Structures for Broadband Mid-Infrared Microphotonics." Optics Letters 38 (2013): 1031-1033.

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