Nanoscale Ion Implantation and Precision Etching Using Conformal Contact Masks

An apparatus for nano-fabrication on a non-conventional substrate includes: a patterned flexible film mechanically coupled to the film support structure; a substrate support structure that receives the substrate for processing; and an actuator The distance between the flexible film and the substrate is adjusted. Nanofabrication on conventional and non-conventional substrates can be achieved by transferring a preformed patterned flexible film onto the substrate using a transfer probe or a non-adhesive sheet, followed by patterning the flexible film The substrate is illuminated to transfer the pattern on the flexible film to or from the substrate. Such apparatus and methods allow for the fabrication of diamond photonic crystals, fiber optic integrated photonic devices, and nitrogen vacancy (NV) centers in diamond.