Monolithic 3D Integration of Massively Parallel Sensing Over Logic
A monolithic, three-dimensional (3D) integrated circuit (IC) device includes a sensing layer, a memory layer, and a processing layer. The sensing layer includes a plurality of carbon nanotube field-effect transistors (CNFETs) that are functionalized with at least 50 functional materials to generate data in response to exposure to a gas. The memory layer stores the data generated by the plurality of CNFETs, and the processing layer identifies one or more components of the gas based on the data generated by the plurality of CNFETs.
Researchers
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systems, devices, and methods for gas sensing
United States of America | Published application -
monolithic 3d integrated circuit for gas sensing and method of making and system using
United States of America | Granted | 11,561,195 -
monolithic 3d integrated circuit for gas sensing and method of making and system using
United States of America | Granted | 12,013,367 -
systems, devices, and methods for gas sensing
China | Published application -
systems, devices, and methods for gas sensing
European Patent Convention | Published application
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