MEMS Formed by QRPLOT

The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.

Researchers

LeeAnn Kim / Corinne Packard / Apoorva Murarka / Vladimir Bulovic / Jennifer Yu

Departments: Office of the Vice President for Research
Technology Areas: Chemicals & Materials: Composites, Nanotechnology & Nanomaterials / Industrial Engineering & Automation: Manufacturing & Equipment
Impact Areas: Connected World

  • method for microcontact printing of mems
    United States of America | Granted | 8,739,390
  • method and apparatus for microcontact printing of mems
    United States of America | Granted | 8,601,658

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