MEMS Devices Formed by Contact Transfer Stamping Process

The disclosure is generally directed to fabrication steps, and operation principles for microelectromechanical (MEMS) transducers. In one embodiment, the disclosure relates to a texture morphing device. The texture morphing device includes: a plurality of supports arranged on a substrate to support a deformable mirror; an ITO layer; and a Distributed Bragg Reflector (DBR) layer. A pair of adjacent supports form a cavity with the ITO layer and the deformable mirror. When the height of the cavity changes responsive to an external pressure, the internal reflection within the cavity is changed. The change in the height of the cavity causes the exterior texture to morph. Similar principles are disclosed for constructing sensor and actuators.

Researchers

Vanessa Wood / Corinne Packard / Apoorva Murarka / Gleb Akselrod / Vladimir Bulovic

Departments: Office of the Vice President for Research
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Semiconductors
Impact Areas: Advanced Materials

  • method and apparatus for forming mems device
    United States of America | Granted | 8,963,262

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