Initiated Plasma Enhanced Chemical Vapor Deposition
Disclosed is an organic coating with a high degree of global planarization. Further disclosed is an iPECVD-based method of coating a substrate with an organic layer having a high degree of global planarization. Disclosed is a flexible, alternating organic and inorganic multi-layer coating with low water permeability, a high-degree of transparency, and a high-degree of global planarization. Also disclosed is an iPECVD-based method of coating a substrate with the alternating organic and inorganic multi-layer coating.
Researchers
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methods of coating surfaces using initiated plasma-enhanced chemical vapor deposition
United States of America | Granted | 9,884,341
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