Elimination of Substrate Optical Leakage in Integrated Photonic Circuits Through Localized Substrate Removal
Exclusively Licensed
Invention type: Technology
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Case number: #13001
Structures including optical waveguides disposed over substrates having a chamber or trench defined therein, and methods for formation thereof.
Researchers
Rajeev Ram
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Jason Orcutt
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Charles Holzwarth
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Milos Popovic
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Judy Hoyt
Departments: Dept of Electrical Engineering & Computer Science
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Photonics
Impact Areas: Connected World, Advanced Materials
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reduction of substrate optical leakage in integrated photonic circuits through localized substrate removal
United States of America | Granted | 7,920,770
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