BEOL Waveguide Integration and Formation of Hybrid BEOL / FEOL Waveguides
Exclusively Licensed
Invention type: Technology
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Case number: #16586J
An integrated structure and method of formation provide a lower level waveguide having a core of a first material and a higher level waveguide having a core of a second material and a coupling region for coupling the two waveguides together. The different core materials provided different coupled waveguides having different light loss characteristics.
Researchers
Milos Popovic
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Ofer Tehar-Zahav
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Zvi Sternberg
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Roy Meade
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Jeffrey Shainline
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Vladimir Stojanovic
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Jason Orcutt
Technology Areas: Communication Systems: Optical / Computer Science: Networking & Signals / Electronics & Photonics: Photonics, Semiconductors
Impact Areas: Connected World
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method and structure providing a front-end-of-line and back-end-of-line coupled waveguides
United States of America | Granted | 9,778,416
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