A Sensor Array Based on Nanowire Field Effect Transistors (NWFETs) for Remote Radiation Sensing

A sensor comprises a substrate; an array of nanowire field effect transistors (NWFETs) formed in said substrate, each of the NWFETs having source, drain and gate terminals; a nanowire coupled between the source terminal and the drain terminal of each NWFET; and a layer of radiation sensitive material disposed over said NWFETs and said nanowires with each of the source, drain and gate terminals configured to be coupled to respective ones of first, second or third reference potentials, wherein each NWFET is configured such that the conductivity between the source and drain changes in response to radiation absorbed in the layer of radiation sensitive material such that the sensor generates an output signal in response to radiation absorbed by the radiation sensitive material.

Departments: David H Koch Institute for Integrative Cancer Res, Office of the Institute Professors, Department of Chemical Engineering
Technology Areas: Biomaterials & Bioelectronics: Health Monitoring / Sensing & Imaging: Chemical & Radiation Sensing
Impact Areas: Healthy Living

  • nanowire fet imaging system and related techniques
    United States of America | Granted | 9,972,649

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