Pixel Scale Fabry Perot Filter Array for Chemical Agent Vapor Detection

Fabry-Pérot filters having different cavity thicknesses are formed in arrays on a substrate for spectral sensing. The filter array can be coupled to a detector array to make a compact, low size, weight and power spectral sensor that detects spectral information in a scene viewed by the detector array. The spectral sensor can be used in a compact spectrometer to detect the presence of harmful chemical vapors.

Researchers

Departments: Lincoln Laboratory
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Sensing & Imaging: Chemical & Radiation Sensing
Impact Areas: Advanced Materials

  • pixel scale fabry perot filter array for chemical agent vapor detection
    United States of America | Published application

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