Parallel Microcavity Trimming by Structured-Laser Illumination
Invention type: Technology
/
Case number: #24317
Methods and systems are described for precisely adjusting characteristics of microfabricated devices after device fabrication. The adjustments can be carried out in parallel on a plurality of the microfabricated devices. By carrying out the adjustment process, uniformity of feature sizes to a few picometers (one standard deviation) and corresponding uniformity of operating characteristics for a plurality of microfabricated devices are possible.
Researchers
Dirk R Englund
/
Ian Christen
/
Christopher Panuski
Departments: Dept of Electrical Engineering & Computer Science
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Lasers
Impact Areas: Advanced Materials
-
parallel microcavity trimming by structured-laser illumination
United States of America | Published application
License this technology
Interested in this technology? Connect with our experienced licensing team to initiate the process.
Sign up for technology updates
Sign up now to receive the latest updates on cutting-edge technologies and innovations.