Nanoscale Xray Tomosynthesis for Rapid Analysis of IC Dies (NeXT-RAID)

Departments: Department of Nuclear Science and Engineering, Dept of Electrical Engineering & Computer Science, Department of Mechanical Engineering
Technology Areas: Biotechnology: Sensors & Monitoring / Chemicals & Materials: Nanotechnology & Nanomaterials / Computer Science: Bioinformatics / Sensing & Imaging: Chemical & Radiation Sensing

  • nanoscale x-ray tomosynthesis for rapid analysis of integrated circuit (ic) dies
    United States of America | Granted | 11,152,130

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