Modular Cathode for Micro Electron Beam Pumped Deep UV Laser
Non-Exclusively Licensed
Invention type: Technology
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Case number: #17550
Example compact modular electron beam units are provided that can be used to generate electron beams using field emitter elements. A modular electron beam unit may comprise an electron beam source including a base portion, at least one field emitter element coupled to the base portion, the field emitter element including a field emitter tip, at least one gate electrode and a membrane window disposed over the at least one gate electrode.
Researchers
Akintunde Ibitayo Akinwande
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Stephen Guerrera
Departments: Dept of Electrical Engineering & Computer Science
Technology Areas: Electronics & Photonics: Photonics, Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment / Sensing & Imaging: Imaging
Impact Areas: Advanced Materials
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compact modular cathode
United States of America | Granted | 10,319,554
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