Magnetically Levitated Reticle Transport Stage for Ultra Clean Vacuum Environments
Non-Exclusively Licensed
Invention type: Technology
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Case number: #19605J
A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.
Researchers
David L Trumper
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Ruvinda Gunawardana
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Lei Zhou
Departments: Department of Mechanical Engineering
Technology Areas: Industrial Engineering & Automation: Manufacturing & Equipment, Motors
Impact Areas: Advanced Materials
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transport system having a magnetically levitated transportation stage
United States of America | Published application -
transport system having a magnetically levitated transportation stage
United States of America | Granted | 11,360,400 -
transport system having a magnetically levitated transportation stage
United States of America | Granted | 11,953,836
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