Magnetically Levitated Linear Slice Stage
Described herein is a magnetically levitated linear transportation stage which utilizes a permanent magnet bias flux to generate a passive magnetic/suspension force/torque in a first set of directions orthogonal to a direction of transportation stage travel, a motor flux which forms a traveling wave along a direction of transportation stage travel and a suspension control force orthogonal to the direction of transportation stage travel. Such a magnetically levitated linear transportation stage is suitable for use in in-vacuum transportation tasks such as in conjunction with photo lithography systems (e.g. extreme ultra violet (EUV) machines).
Researchers
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magnetically-levitated transporter
United States of America | Granted | 11,393,706
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