High-Temperature Quartz Insert Design for Controlling Material Input

This technology consists of a flow through valve, which can satisfy the manufacturing constraints encountered when handling materials at high temperatures and low pressures, for example during semiconductor thin-film manufacturing using techniques such as vapor transport deposition.

Researchers

Ella Wassweiler / Anurag Panda / Vladimir Bulovic

Departments: Office of the Vice President for Research
Technology Areas: Electronics & Photonics: Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment
Impact Areas: Advanced Materials

  • high-temperature quartz insert design for controlling material input
    United States of America | Published application

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