High-Temperature Quartz Insert Design for Controlling Material Input
Invention type: Technology
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Case number: #23408
This technology consists of a flow through valve, which can satisfy the manufacturing constraints encountered when handling materials at high temperatures and low pressures, for example during semiconductor thin-film manufacturing using techniques such as vapor transport deposition.
Researchers
Departments: Research Laboratory of Electronics, Office of the Vice President for Research
Technology Areas: Electronics & Photonics: Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment
Impact Areas: Advanced Materials
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high-temperature quartz insert design for controlling material input
United States of America | Published application
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