Heteroepitaxially Integrated Compound Semiconductor Optical Devices with Silicon or Silicon Nitride On-Chip Waveguides

Departments: Lincoln Laboratory
Technology Areas: Chemicals & Materials: Composites, Nanotechnology & Nanomaterials / Communication Systems: Optical / Electronics & Photonics: Semiconductors
Impact Areas: Advanced Materials

  • heteroepitaxially integrated compound semiconductor optical devices with on-chip waveguides
    United States of America | Published application

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