Hemispherical Photodetector Focal Plane Array Via Graphene Based Layer Transfer

A method of fabricating a curved focal plane array (FPA) includes forming an epitaxial layer including a semiconductor on a release layer. The release layer includes a two-dimensional (2D) material and is disposed on a first substrate. The method also includes forming a metal layer on the epitaxial layer and transferring the epitaxial layer and the metal layer to a second substrate including an elastomer. The method also includes fabricating a plurality of photodetectors from the epitaxial layer and bending the second substrate to form the curved FPA.

Researchers

Jeehwan Kim / Kyusang Lee

Departments: Department of Mechanical Engineering
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Photonics, Semiconductors

  • apparatus and methods for curved focal plane array
    United States of America | Granted | 11,063,073

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