Doped Encapsulating Material to Stabilize Diamond's Electrical Properties

According to some embodiments, a method for stabilizing electrical properties of a diamond semiconductor comprises terminating a surface of a diamond with hydrogen (H) or deuterium (D) atoms and over-coating the surface of the diamond with an encapsulating material comprising metal oxide salt doped with one or more elements capable of generating negative charge in the metal oxide salt.

Researchers

Michael Geis / Joseph Varghese / Robert Nemanich

Departments: Lincoln Laboratory
Technology Areas: Chemicals & Materials: Catalysis & Synthesis, Nanotechnology & Nanomaterials / Electronics & Photonics: Semiconductors
Impact Areas: Advanced Materials

  • doped encapsulating material for diamond semiconductors
    United States of America | Granted | 11,152,483

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