A Diaphragm Flexure With Large Range and High Load Capacity
Invention type: Technology
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Case number: #13108
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes a flexure arrangement having one or more diaphragm flexures arranged in a series or parallel or hybrid configuration so as to manage load-capacity while still achieving adequate vertical and angular range of a sample supported on the one or more diaphragm flexures.
Researchers
Kamal Youcef-Toumi
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Vijay Shilpiekandula
Departments: Department of Mechanical Engineering
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment
Impact Areas: Advanced Materials
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diaphragm flexure with large range and high load capacity
United States of America | Granted | 8,210,840
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