Controlled Delamination Through Surface Engineering for Nonplanar Fabrication

Departments: Dept of Electrical Engineering & Computer Science, Electrical Eng & Computer Sci
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Semiconductors / Industrial Engineering & Automation: Manufacturing & Equipment / Sensing & Imaging: Chemical & Radiation Sensing
Impact Areas: Advanced Materials

  • controlled delamination through surface engineering for nonplanar fabrication
    Patent Cooperation Treaty | Published application

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