3D-Printed Field Emission Sources for Compact Systems

A field emission electron source and a method of manufacturing the same. A field emission electron source comprises an emitting electrode and an extractor gate electrode. The emitting electrode comprising a plurality of particles with nanosharp protrusions. The extractor gate electrode comprises a metal. The extractor gate electrode is formed in a same plane as the emitting electrode. The extractor gate electrode is formed surrounding the emitting electrode. A method of manufacturing a field emission electron source comprises forming an emitting electrode comprising a plurality of particles with nanosharp protrusions using a direct ink writing (DIW) printer. The method comprises forming an extractor gate electrode comprising a metal using the DIW printer.

Researchers

Luis Velasquez-Garcia / Imperio Perales Martinez

Departments: Microsystems Technology Laboratories
Technology Areas: Chemicals & Materials: Metals, Nanotechnology & Nanomaterials / Electronics & Photonics: Quantum Technology / Industrial Engineering & Automation: Manufacturing & Equipment
Impact Areas: Advanced Materials

  • 3d-printed field emission sources for compact systems
    United States of America | Granted | 11,791,121

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