Reticle Stage Pusher Actuator
Invention type: Technology
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Case number: #25332
Researchers
Departments: Mechanical Engineering, Department of Mechanical Engineering
Technology Areas: Industrial Engineering & Automation: Manufacturing & Equipment, Robotics
Impact Areas: Sustainable Future
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pneumatically actuated photolithography reticle stage
United States of America | Pending -
photolithography reticle stage drive system
United States of America | Pending -
photolithography reticle stage actuators
United States of America | Pending
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