Semiconductors & Integrated Circuits

Multiple Lithography Method for Directed Materials Assembly

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Guided Self-assembly of Block Copolymer Line Structures for Integrated Circuit Interconnects

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Control of Current Collapse in Thin Pattern GaN

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Guided-wave Photodetectors Using Mid-bandgap States

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CMOS Photodiode

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HHG as the Basis of High Efficiency EUV Sources

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Low-cost and Transparent Sensor Array Systems for Cellular Monitoring and Smart Skin Applications

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Fabrication of Large-area Hexagonal Boron Nitride Thin Films

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Modular Cathode for Micro Electron Beam Pumped Deep UV Laser

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Patterning of Arbitrary 3D Surfaces via Direct-write Hybrid Lithography

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