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Problem Addressed

Traditional MEMS resonators are freely suspended or released and operated under vacuum/air to ensure free boundary conditions for acoustic reflection. However, when a resonator is fully encapsulated and surrounded by solid material the lack of perfect acoustic reflections at the boundary as well as energy losses to the surrounding medium result in a much reduced quality factor as well as output signal. To maintain a high quality factor for unreleased resonators, Phononic crystals (PnCs) and Acoustic Bragg reflectors (ABRs) can be used as confinement structures and trap specific frequencies within the cavity.