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Problem Addressed

Existing technologies that are capable of reaching cryogenic temperature are efficient at macroscale; however, they are difficult to scale down to the microscale (around 20 microns), and their efficiency significantly drops with size reduction. Current commercial multistage thermoelectric devices are based on stacking multiple thermoelectric coolers, which leads to their larger size - limiting the coolers applications. This technology fabricates multistage thermoelectric micro cryogenic coolers by building all the stages along the plane of a film such that all the stages can be fabricated together through the use of microfrabrication technologies. Furthermore, the technology uses the idea of hybrid micro-miniature stacking, using a miniature stage as the last stage of the system to provide maximum flexibility to the environment temperature The miniature stage has a much higher cooling power.