This technology describes a method for batch fabrication of MEMS quadrupoles, utilizing economy of scale for production and distribution. The quadrupole mass filters produced by this method have a rectangular electrode cross section. The performance reduction caused by the use of non-circular electrodes is compensated for by operating these devices in high-order stability regions that yield higher resolution.
The use of batch fabrication techniques allows very precise manufacture of the quadrupoles; because the quadrupoles are batch-fabricated, quadrupoles from the same batch share the same misalignment configuration, which means tuning of the quadrupoles in an analytical system can be more easily performed. The invention includes a series of etch steps, electrical insulator growth/deposition steps, wafer bonding steps, and metal deposition that can be utilized to fabricate the device.