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This technology defines the design, fabrication, and characterization of a gas field ionizer made from large arrays of resilient, self-aligned gated nano scale tips. These tips are capable of field ionizing helium (the hardest gas to field ionize) at voltages as low as 150 V, and can generate ion fluxes exceeding 1.76 ×10^(10) cm^(-2) s^(-1), with long term (> 104 s) stable characteristics at pressures as high as 1 Torr.