Header and Body 2

Problem Addressed

An unreleased MEMS resonator integrated with CMOS forms a single chip solution that offers clocks, filters, and sensors with superior performance at GHz-frequencies, while reducing size, weight, and power consumption of the overall system. Direct CMOS integration simplifies the fabrication process as no post-processing or special packaging is required. Until now, such MEMS resonators have demonstrated moderate low quality factor (Q~20).