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Technology

This technology removes the need for post-processing release steps by creating Acoustic Bragg Grating Coupler (ABGC) structures that allow vibration energy to flow between distinct cavities. The acoustically coupled multi-cavity structures allow the resonator to take advantage of a phenomenon called Mode Localization, where vibration energy is spatially localized. This configuration improves the mechanical quality by reducing energy leakage. It also improves motional resistance by increasing the vibration amplitudes, and consequently the generated motional currents. Moreover, this technology also proposes the use of a multi-cavity structure for the design of electronic transmission filters. The use of acoustically coupled resonator cavities makes the manufacture of two types of transmission filters possible: Transmission Line and a Multi-pole topology. Altering the coupling strength between the cavities allows for the design of transmission filters with adjustable properties, such as the bandwidth of pass-band and the central frequency.