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Technology

The technology is a new technique of MEMS-scale energy harvesting, for low-frequency, wide-bandwidth applications. Designed specifically for MEMS applications, the invention lowers the working frequency of the energy harvester device to below 100 Hz in order to match the typical frequency spectrum of ambient vibrations while maintaining the wide-bandwidth and high power output. The low working frequency increases minute energy harvesting feasibility, while utilizing the natural residual stress present in MEMS thin films.