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Problem Addressed

Large area scanning and super high resolution (SR) imaging of surfaces traditionally relies on the translation of results obtained by scanning and sampling in Cartesian coordinates. These techniques require complex hardware and/or software methods to ensure low vibration, fast scanning and high precision, and have issues such as registration errors induced by poor motion estimation, limited recovery of high frequencies in non-lateral dimensions, and vibration induced image degradation in some sensitive devices. Existing rotational sampling methods suffer from sparse data and variation in the outer radii as a result of uniform Polar sampling.